Ablation time (h)

Target mass lost (mg)

Mass lost rate ×10⁻³ (mg/min)

Thickness (nm)

Deposition rate (Å/min)

Average particle size (nm)

1

0.7

11.7

35

5.8

28.4

2

1.1

9.2

44

3.7

29.8

3

1.4

7.8

58

3.2

35.1